| |
| 科研成果 |
|
|
 |
|
| 论文题目： |
Phase mode nanomachining on ultra-thin films with atomic force microscopy |
| 第一作者： |
Shi JL(施佳林);Liu LQ(刘连庆);Yu P(于鹏);Li GY(李广勇) |
| 参与作者： |
|
| 联系作者： |
|
| 发表刊物： |
Materials Letters |
| 发表年度： |
2017 |
| 卷,期,页： |
209,,437-440 |
| 论文出处： |
|
| 第一作者所在部门： |
|
| 论文编号： |
|
| 论文摘要： |
Machining or patterning ultra-thin films with specified structures are critical challenges. In this work, a novel mode of atomic force microscopy nanomachining is proposed. The phase response of the cantilever is used as the input of feedback control to modulate the machining force to achieve the desired machined depth. The proposed phase mode, overcoming the disadvantages of force mode, is not affected by the debris piled-up and has the ability to sense the interface of an ultra-thin film and predict the machining depth without post-imaging. The effectiveness of the phase mode has been proven by experiments. |
| 论文全文： |
|
| 其他备注： |
|
| 附件下载： |
|
|
|
