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| 科研成果 |
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| 论文题目： |
Fabrication of bottom fillet nano-mold to increase the mold lifetime |
| 第一作者： |
Yin, Zhifu;Lu BL(鲁伯林);Cheng, E.;Sun, Lei;Zou, Helin |
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| 发表刊物： |
Journal of Nanoscience and Nanotechnology |
| 发表年度： |
2017 |
| 卷,期,页： |
17,12,8975-8980 |
| 论文出处： |
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| 论文摘要： |
T-NIL (Thermal imprint lithography) is a promising technology to fabricate low-cost, high-throughput, and high resolution nano-structures in the polymer substrates. However, the foremost issues during T-NIL are the development of a low-cost and concise nano-mold fabrication method and improvement of the nano-mold lifetime. In this paper, the stress distribution in the nano-mold was studied by numerical simulation method and the fracture mechanism of the nano-mold was proposed. According to the simulation results, a fillet in the bottom of the nano-mold can significantly increase the lifetime of the nano-mold. Therefore, a top fillet SiNxnano-mold with low-cost was fabricated by SiNxdeposition method, and then the bottom fillet PDMS nano-mold with 330 nm wide and 1.3 μm deep nanochannels was replicated by casting mold method. During SiNxdeposition, the ratio of high frequency and low frequency and deposition temperature were optimized. The SiNxfilm with small compressive stress of 75.7 MPa can be deposited on the Si substrate. |
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